Physical quantity detection circuit and physical quantity sensor device

ABSTRACT

A physical quantity detection circuit ( 12 ) is used for a physical quantity sensor ( 10 ) that outputs a sensor signal according to a physical quantity given externally. A phase adjustment circuit ( 100 ) receives a reference clock (CKref) and operates in synchronization with an operation clock (CKa), to delay a transition edge of the reference clock by a predetermined number of pulses of the operation clock. A detection circuit ( 104 ) detects a physical quantity signal from the sensor signal (Ssnc) using a transition edge of a clock (SSS) from the phase adjustment circuit ( 100 ) as the reference.

CROSS-REFERENCE TO RELATED APPLICATIONS

This is a continuation of PCT International ApplicationPCT/JP2009/000304 filed on Jan. 27, 2009, which claims priority toJapanese Patent Application No. 2008-098697 filed on Apr. 4, 2008. Thedisclosures of these applications including the specifications, thedrawings, and the claims are hereby incorporated by reference in itsentirety.

BACKGROUND

The technique disclosed herein relates to a physical quantity detectioncircuit used for a physical quantity sensor that detects a physicalquantity given externally and to a physical quantity sensor deviceprovided with the same, and more particularly, to a technique ofadjusting the phase relationship between a sensor signal and a detectionsignal.

Conventionally, physical quantity sensor devices capable of detecting aphysical quantity (e.g., an angular velocity, an acceleration, etc.) areused in a variety of technical fields such as detection of shake of adigital camera, attitude control of a mobile unit (e.g., an aircraft, anautomobile, a robot, a vessel, etc.), and guidance of a missile and aspacecraft. In general, a physical quantity sensor device includes: aphysical quantity sensor that outputs a sensor signal according to aphysical quantity given externally; and a physical quantity detectioncircuit that detects a physical quantity signal (signal corresponding tothe physical quantity) from the sensor signal using a detection signal(signal having a frequency corresponding to the frequency of the sensorsignal). In such a physical quantity detection circuit, an unintentionalphase shift may sometimes occur between the sensor signal and thedetection signal due to fabrication variations (diffusion variations inresistances and capacitors, etc.) and fluctuations in the surroundingenvironment (e.g., changes in temperature, etc.). It is thereforeimportant to adjust the phase relationship between the sensor signal andthe detection signal to keep the sensor signal and the detection signalsynchronized with each other. To address this problem, JapaneseLaid-Open Patent Publication No. 8-14916 discloses a vibration gyro,provided with a phase correction circuit including atemperature-sensitive element (element having a predeterminedtemperature characteristic), to correct a phase shift caused by atemperature change.

SUMMARY

However, due to fabrication variations, the phase correction circuitdoes not always exhibit a desired temperature characteristic, and henceit has been difficult to set the phase correction amount precisely inthe phase adjustment circuit. As such, conventionally, with the failureof precise adjustment of the phase relationship between the sensorsignal and the detection signal, it has been difficult to improve thedetection precision.

An object of the technique disclosed herein is adjusting the phaserelationship between the sensor signal and the detection signalprecisely.

According to one aspect of the present invention, the physical quantitydetection circuit is a physical quantity detection circuit used for aphysical quantity sensor that outputs a sensor signal according to aphysical quantity given externally, the circuit including a first phaseadjustment circuit configured to receive a reference clock having afrequency corresponding to the frequency of the sensor signal andoperate in synchronization with a first operation clock having afrequency higher than the frequency of the reference clock, to delay atransition edge of the reference clock by a predetermined number ofpulses of the first operation clock, and a detection circuit configuredto detect a physical quantity signal corresponding to the physicalquantity from the sensor signal using a transition edge of the referenceclock delayed by the first phase adjustment circuit as the reference. Inthis physical quantity detection circuit, the phase of the referenceclock (i.e., the phase of the detection signal) can be set using theperiod of the first operation clock as the unit. Also, as the frequencyof the first operation clock is higher, the phase of the reference clockcan be set more precisely. Hence, the phase relationship between thesensor signal and the detection signal can be adjusted more preciselythan conventionally done, permitting improvement in detection precision.

The first phase adjustment circuit described above may include: a shiftregister configured to shift the reference clock sequentially insynchronization with the first operation clock to generate a pluralityof delayed clocks; and a selector configured to select one of theplurality of delayed clocks generated by the shift register. Thedetection circuit may detect the physical quantity signal from thesensor signal using a transition edge of the delayed clock selected bythe selector as the reference. With this configuration, the referenceclock can be delayed by a predetermined number of pulses of the firstoperation clock.

The detection circuit described above may include: an analog-to-digitalconverter circuit configured to convert the sensor signal to a digitalsensor signal; a detection signal generator circuit configured togenerate a digital detection signal corresponding to a sine wave signalin response to a transition edge of the delayed clock selected by theselector; and a multiplier circuit configured to multiply the digitalsensor signal obtained by the analog-to-digital converter circuit by thedigital detection signal generated by the detection signal generatorcircuit, to detect the physical quantity signal. By digitizing thephysical quantity detection circuit in this way, the robustness againstfabrication variations and fluctuations in the surrounding environment(e.g., fluctuations in power supply voltage and changes in temperature)can be enhanced.

Alternatively, the first phase adjustment circuit may include a phaseadjustment counter configured to start counting the number of generatedpulses of the first operation clock in response to a transition edge ofthe reference clock and generate a timing signal once the number ofgenerated pulses reaches a predetermined value. The detection circuitmay detect the physical quantity signal from the sensor signal using atransition edge of the timing signal generated by the phase adjustmentcounter as the reference. With this configuration, the reference clockcan be delayed by a predetermined number of pulses of the firstoperation clock.

The detection circuit described above may include: an analog-to-digitalconverter circuit configured to convert the sensor signal to a digitalsensor signal; a detection signal generator circuit configured togenerate a digital detection signal corresponding to a sine wave signalin response to a transition edge of the timing signal generated by thephase adjustment counter; and a multiplier circuit configured tomultiply the digital sensor signal obtained by the analog-to-digitalconverter circuit by the digital detection signal generated by thedetection signal generator circuit, to detect the physical quantitysignal. By digitizing the physical quantity detection circuit in thisway, the robustness against fabrication variations and fluctuations inthe surrounding environment can be enhanced.

Preferably, the physical quantity detection circuit described abovefurther includes: a second phase adjustment circuit configured toreceive the digital sensor signal obtained by the analog-to-digitalconverter circuit and operate in synchronization with a second operationclock having a frequency higher than the frequency of the referenceclock, to delay the digital sensor signal by a predetermined number ofpulses of the second operation clock, wherein the multiplier circuitmultiplies the digital sensor signal delayed by the second phaseadjustment circuit by the digital detection signal. In this physicalquantity detection circuit, with the phases of both the sensor signaland the detection signal being settable, it is possible to correct botha phase delay in the sensor signal and a phase delay in the detectionsignal.

Preferably, the frequency of the first operation clock is lower than thefrequency of the second operation clock. With this setting, theprecision of the phase adjustment of the first phase adjustment circuitis lower than that of the second phase adjustment circuit. With thissharing of the phase adjustment processing between the first and secondphase adjustment circuits that are different in phase adjustmentprecision, the circuit scale and power consumption required for thephase adjustment processing can be reduced.

According to another aspect of the invention, the physical quantitydetection circuit is a physical quantity detection circuit used for aphysical quantity sensor that outputs a sensor signal according to aphysical quantity given externally, the circuit including: ananalog-to-digital converter circuit configured to convert the sensorsignal to a digital sensor signal; a detection signal generator circuitconfigured to generate a digital detection signal corresponding to asine wave signal in response to a transition edge of a reference clockhaving a frequency corresponding to the frequency of the sensor signal;a phase adjustment circuit configured to receive the digital sensorsignal obtained by the analog-to-digital converter circuit and operatein synchronization with a clock having a frequency higher than thefrequency of the reference clock, to delay the digital sensor signal bya predetermined number of pulses of the operation clock; and amultiplier circuit configured to multiply the digital sensor signaldelayed by the phase adjustment circuit by the digital detection signalgenerated by the detection signal generator circuit, to detect aphysical quantity signal corresponding to the physical quantity. In thisphysical quantity detection circuit, the phase of the sensor signal(digital sensor signal) can be set using the period of a clock having afrequency higher than the frequency of the reference clock as the unit.Also as the frequency of the clock is higher, the phase of the digitalsensor signal can be set more precisely. Hence, the phase relationshipbetween the sensor signal and the detection signal can be adjusted moreprecisely than conventionally done, permitting improvement in detectionprecision.

According to yet another aspect of the invention, the physical quantitydetection method is a method for detecting a physical quantity signalfrom a sensor signal from a physical quantity sensor that detects aphysical quantity given externally, the physical quantity signalcorresponding to the physical quantity, the physical quantity detectionmethod including the steps of: delaying at least one of the sensorsignal and a detection signal corresponding to the sensor signal by apredetermined number of pulses of an operation clock having a frequencyhigher than the frequency of the sensor signal; and detecting thephysical quantity signal using the sensor signal and the detectionsignal at is least one of which has been delayed. In this physicalquantity detection method, the phase relationship between the sensorsignal and the detection signal can be adjusted using the period of asignal having a frequency higher than the frequency of the referenceclock as the unit.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a view showing an example configuration of a physical quantitysensor device of Embodiment 1.

FIG. 2 is a timing chart illustrating the operation of a physicalquantity detection circuit shown in FIG. 1.

FIG. 3 is a view showing an alteration of the physical quantitydetection circuit shown in FIG. 1.

FIG. 4A is a view showing an example configuration of a detection signalgenerator shown in FIG. 3.

FIG. 4B is a view showing an example correspondence between the countvalue and the sine wave data in the detection signal generator of FIG.4A.

FIG. 5 is a timing chart illustrating the operation of the physicalquantity detection circuit shown in FIG. 3.

FIG. 6A is a view showing another example configuration of the detectionsignal generator shown in FIG. 3.

FIG. 6B is a view showing an example correspondence between the countvalue and the sine wave data in the detection signal generator of FIG.6A.

FIG. 7 is a view showing an example configuration of a physical quantitysensor device of Embodiment 2.

FIG. 8 is a timing chart illustrating the operation of a physicalquantity detection circuit shown in FIG. 7.

FIG. 9 is a view showing Alteration 1 of the physical quantity detectioncircuit shown in FIG. 7.

FIG. 10 is a timing chart illustrating the operation of the physicalquantity detection circuit shown in FIG. 9.

FIG. 11 is a view showing Alteration 2 of the physical quantitydetection circuit shown in FIG. 7.

FIG. 12 is a view showing an example configuration of a physicalquantity sensor device of Embodiment 3.

FIG. 13 is a timing chart illustrating the operation of a physicalquantity detection circuit shown in FIG. 12.

FIG. 14 is a view showing Alteration 1 of the physical quantitydetection circuit shown in FIG. 12.

FIG. 15 is a timing chart illustrating the operation of the physicalquantity detection circuit shown in FIG. 14.

FIG. 16 is a view showing Alteration 2 of the physical quantitydetection circuit shown in FIG. 12.

FIG. 17 is a view showing Alteration 3 of the physical quantitydetection circuit shown in FIG. 12.

FIG. 18 is a timing chart illustrating the operation of the physicalquantity detection circuit shown in FIG. 17.

FIG. 19 is a view showing Alteration 4 of the physical quantitydetection circuit shown in FIG. 12.

FIG. 20 is a view showing an alteration of a physical quantity sensor.

DETAILED DESCRIPTION

Preferred embodiments will be described in detail hereinafter withreference to the accompanying drawings. It should be noted thatidentical or equivalent components are denoted by the same referencecharacters throughout the drawings, and no repeated description will bemade on such components.

Embodiment 1

FIG. 1 shows an example configuration of a physical quantity sensordevice of Embodiment 1. The physical quantity sensor device includes aphysical quantity sensor 10, a drive circuit 11, and a physical quantitydetection circuit 12.

[Physical Quantity Sensor]

The physical quantity sensor 10 receives a drive signal Sdrv having apredetermined frequency from the drive circuit 11, and outputs a sensorsignal S10 according to a physical quantity (e.g., an angular velocity,an acceleration, etc.) given externally. The frequency of the sensorsignal S10 corresponds to the frequency of the drive signal Sdrv. Forexample, the center frequency (carrier frequency) of the sensor signalS10 is equal to the frequency of the drive signal Sdrv. Assume in thisembodiment that the physical quantity sensor 10 is a tuning fork typeangular velocity sensor. The physical quantity sensor 10 includes atuning fork body 10 a, a drive piezoelectric element Pdrv, anoscillation detection piezoelectric element Posc, and angular velocitydetection piezoelectric elements PDa and PDb. The tuning fork body 10 ahas two prongs each twisted by the right angle in the center, aconnection for connecting the two prongs at their ends on one side, anda support pin provided at the connection to serve as a rotation axis.The drive piezoelectric element Pdrv oscillates one prong according tothe frequency and amplitude of the drive signal Sdrv supplied from thedrive circuit 11, causing resonance of the two prongs. With thisoscillation of the tuning fork, charge is generated in the isoscillation detection piezoelectric element Posc (i.e., an oscillationsignal Sosc is generated). Also, once a rotational angular velocityoccurs, an amount of charge responsive to the rotational angularvelocity (Coriolis force) is generated in the angular velocity detectionpiezoelectric elements PDa and PDb (i.e., the sensor signal S10 isgenerated).

[Drive Circuit]

The drive circuit 11 supplies the drive signal Sdrv to the physicalquantity sensor 10. Also, the drive circuit 11 adjusts the frequency andamplitude of the drive signal Sdrv according to the oscillation signalSosc from the physical quantity sensor 10. In the drive circuit 11, amonitor amplifier 11 a converts the oscillation signal Sosc from thephysical quantity sensor 10 to a voltage. An automatic gain controlamplifier (AGC) 11 b amplifies or attenuates the output of the monitoramplifier 11 a, changing its amplification gain so that the voltagesupplied to a drive amplifier 11 c is kept constant. The drive amplifier11 c controls the frequency and amplitude of the drive signal Sdrvaccording to the output of the AGC 11 b. In this way, with theadjustment of the drive signal Sdrv according to the oscillation signalSosc, the maximum oscillation amplitude and oscillation frequency of thephysical quantity sensor 10 are kept constant.

[Physical Quantity Detection Circuit]

The physical quantity detection circuit 12 detects the physical quantitybased on the sensor signal S10 from the physical quantity sensor 10. Thephysical quantity detection circuit 12 includes a wave shaping circuit101, a frequency multiplication circuit 102, a phase adjustment circuit100, an input amplifier 103, a sync detection circuit 104, a low-passfilter 105, and an output amplifier 106.

The wave shaping circuit 101 converts the drive signal Sdrv to a squarewave and outputs the resultant signal as a reference clock CKref. Thewave shaping circuit 101 is includes a comparator or an inverter, forexample. The frequency of the reference clock CKref is substantially thesame as the frequency of the drive signal Sdrv (i.e., the frequency ofthe sensor signal S10). The frequency multiplication circuit 102multiplies the reference clock CKref to generate an operation clock CKahaving a frequency higher than that of the reference clock CKref. Thefrequency multiplication circuit 102 includes a phase locked loop (PLL),for example.

The phase adjustment circuit 100 includes a shift register 100R and aselector 100S. The shift register 100R shifts the reference clock CKreffrom the wave shaping circuit 101 sequentially in synchronization withthe operation clock CKa from the frequency multiplication circuit 102,to generate n (n is an integer equal to or more than 2) delayed clocksCK1, CK2, . . . , CKn whose phases are shifted from each other by apredetermined amount. The shift register 100R includes a plurality ofcascaded flipflops, for example. The selector 100S selects one of thedelayed clocks CK1, CK2, . . . , CKn according to a set value SET setunder external control, and outputs the selected delayed clock as aselected clock SSS. The set value SET is a value for setting the delaytime in the phase adjustment circuit 100, which indicates the number ofpulses of the operation clock CKa. For example, when the set value SETis set at “3,” the selector 100S selects the third delayed clock CK3.With this selection, the delay time in the phase adjustment circuit 100is set at the time corresponding to three pulses of the operation clockCKa.

The input amplifier 103 converts the sensor signal S10 received from thephysical quantity sensor 10 to a voltage and outputs the resultantsignal as an analog sensor signal Ssnc. The sync detection circuit 104detects a physical quantity signal (signal corresponding to the physicalquantity sensed by the physical quantity sensor 10) from the analogsensor signal Ssnc obtained by the input amplifier 103 using theselected clock SSS from the phase adjustment circuit 100. The low-passfilter 105 allows only a low-frequency component of the physicalquantity signal detected by the sync detection circuit 104 to passtherethrough for noise removal and the like. The output amplifier 106amplifies the physical quantity signal processed by the low-pass filter105 and outputs the resultant signal as an analog detected signal Sphy.

[Operation]

Next, the operation of the physical quantity detection circuit 12 shownin FIG. 1 will be described with reference to FIG. 2. In the illustratedexample, assume that the period of the operation clock CKa is “t” andthat the phase of the analog sensor signal Ssnc lags behind the phase ofthe drive signal Sdrv (i.e., the phase of the reference clock CKref) by“3t.”

The wave shaping circuit 101 converts the drive signal Sdrv to thereference clock CKref, and the frequency multiplication circuit 102generates the operation clock CKa based on the reference clock CKref.The shift register 100R generates a plurality of delayed clocks CK1,CK2, . . . , CKn (five in FIG. 2). At this time, when the set value SETis set at “3,” the selector 100S selects the third delayed clock CK3 asthe selected clock SSS. This enables the selected clock SSS to have thesame phase as that of the analog sensor signal Ssnc. Also, since thefrequency of the selected clock SSS is the same as that of the referenceclock CKref, the sync detection circuit 104 is allowed to multiply theanalog sensor signal Ssnc by the selected clock SSS from the phaseadjustment circuit 100 as it is, to detect the physical quantity signal(analog value). In this way, the sync detection circuit 104 startsdetection of the physical quantity signal using a transition edge (arising edge in the illustrated example) of the selected clock SSS as thereference. Also, the transition edges of the selected clock SSS lagbehind those of the reference clock CKref by “3t.” In other words, thephase adjustment circuit 100 delays the transition edges of thereference clock CKref by the time corresponding to three pulses of theoperation clock CKa.

As described above, the phase of the detection signal (selected clockSSS) can be set using the period of the operation clock CKa as the unit,and as the frequency of the operation clock CKa is higher, the phase ofthe selected clock SSS can be set more precisely. Hence, the phaserelationship between the sensor signal and the detection signal can beadjusted more precisely than conventionally done, permitting improvementin detection precision.

The phase adjustment circuit 100 may otherwise be constructed of digitalcircuits. With this configuration, the robustness against fabricationvariations and fluctuations in the surrounding environment (e.g.,fluctuations in power supply voltage and changes in temperature) can bemore enhanced than conventionally done. That is, the error in delay time(delay time in the phase adjustment circuit 100) caused by fabricationvariations and fluctuations in the surrounding environment can bereduced.

Alteration 1 of Embodiment 1

The phase adjustment circuit 100 can also be applied to a digitizedphysical quantity detection circuit as shown in FIG. 3. A physicalquantity detection circuit 12 a shown in FIG. 3 includes an inputamplifier 111, an analog-to-digital converter (A/D) 112, a detectionsignal generator 113, multiplier 114, and a digital filter 115, inaddition to the wave shaping circuit 101, the frequency multiplicationcircuit 102, and the phase adjustment circuit 100 shown in FIG. 1.

The input amplifier 111 converts the sensor signal S10 received from thephysical quantity sensor 10 to a voltage and outputs the resultantsignal as an analog sensor signal Ssnc. The analog-to-digital converter112 samples the analog sensor signal Ssnc in synchronization with theoperation clock CKa and converts sampled analog values (amplitudevalues) to digital values. In this way, the analog sensor signal Ssnc isconverted to a digital sensor signal Dsnc that contains a plurality ofdigital values.

The detection signal generator 113 generates a digital detection signalDdet corresponding to a sine wave signal in response to a transitionedge (a rising edge in the illustrated example) of the selected clockSSS from the phase adjustment circuit 100. The digital detection signalDdet contains a plurality of sine wave data units, which respectivelycorrespond to a plurality of analog values (amplitude values) obtainedby sampling a sine wave signal having a predetermined frequency (e.g.,the drive signal Sdrv) in synchronization with a predetermined clock(e.g., the operation clock CKa) (see FIG. 4B). For example, theplurality of sine wave data units indicate ideal amplitude valuesexpressed by a sine function.

The multiplier 114 multiplies the digital sensor signal Dsnc from theanalog-to-digital converter 112 by the digital detection signal Ddetfrom the detection signal generator 113. With this multiplication, aphysical quantity signal (digital values) is detected. The digitalfilter 115, operating in synchronization with the operation clock CKa,allows only a low-frequency component of the physical quantity signaldetected by the multiplier 114 to pass therethrough as a digitaldetected signal Dphy for noise removal and the like.

[Detection Signal Generator]

As shown in FIG. 4A, the detection signal generator 113 includes a ringcounter 121, a data storage section 122, and a data read section 122.The ring counter 121 and the data read section 123 operate insynchronization with the operation clock CKa. The ring counter 121starts incrementing the count value CNT in response to a transition edgeof the selected clock SSS, and resets the count value CNT to “0” oncethe count value CNT reaches a predetermined maximum value. The datastorage section 122 stores a plurality of units of sine wave data DATAon which the digital detection signal Ddet is based. The data readsection 123 reads the sine wave data DATA corresponding to the countvalue CNT of the ring counter 121 based on the preset correspondencebetween the count value CNT and the sine wave data DATA (FIG. 4B), andoutputs the read sine wave data. In this way, by outputting the sinewave data units D0, D1, D2, . . . , D15 in rotation, the digitaldetection signal Ddet corresponding to the sine wave signal isgenerated.

[Operation]

Next, the operation of the physical quantity detection circuit 12 ashown in FIG. 3 will be described with reference to FIG. 5. Assume inthis alteration that the phase of the analog sensor signal Ssnc lagsbehind the phase of the reference clock CKref by “3t.”

The analog-to-digital converter 112 converts the analog sensor signalSsnc to digital values P0, P1, P2, . . . in synchronization with theoperation clock CKa. At this time, when the set value SET is set at “3,”the phase adjustment circuit 100 delays the reference clock CKref by thetime “3t” corresponding to three pulses of the operation clock CKa, andoutputs the delayed clock as the selected clock SSS. The detectionsignal generator 113 outputs the sine wave data units D0, D1, D2, . . .in rotation in response to a transition edge of the selected clock SSS.This enables the digital detection signal Ddet to have the same phase asthat of the analog sensor signal Ssnc. The multiplier 114 multiplies thedigital values P0, P1, P2, . . . from the analog-to-digital converter112 by the sine wave data units D0, D1, D2, . . . from the detectionsignal generator 113, respectively. In this way, the phase of thedigital detection signal Ddet is determined with a transition edge ofthe selected clock SSS. In other words, the multiplier 114 startsdetection of the physical quantity signal using a transition edge of theselected clock SSS as the reference.

As described above, the phase adjustment circuit 100 is also applicableto the digitized physical quantity detection circuit. Also, bydigitizing the physical quantity detection circuit, the robustnessagainst fabrication variations and fluctuations in the surroundingenvironment can be enhanced, and hence the detection precision can befurther improved.

Note that another operation clock (a clock different in frequency fromthe operation clock CKa) having a frequency higher than the frequency ofthe reference clock CKref may be supplied to the phase adjustmentcircuit 100.

[Alteration of Detection Signal Generator]

As shown in FIG. 6A, the detection signal generator 113 may beconfigured so that the ring counter 121 starts incrementing the countvalue CNT in response to a transition edge of the reference clock CKref.In this case, the correspondence between the count value CNT and thesine wave data DATA in the data read section 123 can be set underexternal control CTRL. The data read section 123 starts reading the sinewave data DATA corresponding to the count value CNT in response to atransition edge of the selected clock SSS. For example, when the setvalue SET in the phase adjustment circuit 100 is set at “3,” thecorrespondence between the count value CNT and the sine wave data DATAis set as shown in FIG. 6B. With such setting, the detection signalgenerator 113 is allowed to output the sine wave data units D0, D1, D2,. . . in rotation in response to a transition edge of the selected clockSSS.

Embodiment 2

FIG. 7 shows an example configuration of a physical quantity sensordevice of Embodiment 2. This physical quantity sensor device includes aphysical quantity detection circuit 22 in place of the physical quantitydetection circuit 12 shown in FIG. 1. The physical quantity detectioncircuit 22 includes a phase adjustment circuit 200 in place of the phaseadjustment circuit 100 shown in FIG. 1. The other configuration issimilar to that in FIG. 1.

The phase adjustment circuit 200 includes a phase adjustment counter 201and a frequency division circuit 202. The phase adjustment counter 201starts counting the number of generated pulses of the operation clockCKa in response to a transition edge (a rising edge in the illustratedexample) of the reference clock CKref, and outputs a timing signal TTTonce the count value reaches a set value SET set under external control.The phase adjustment counter 201 includes a plurality of flipflops andlogical operators, for example. The frequency division circuit 202starts frequency division processing in response to a transition edge ofthe timing signal TTT from the phase adjustment counter 201 (forexample, the output of the frequency division circuit 202 is reset toits initial state). The frequency division circuit 202 then divides thefrequency of the operation clock CKa to generate an analog detectionsignal Sdet having the same frequency as the reference clock CKref. Forexample, when the frequency of the operation clock CKa is 16 times ashigh as the frequency of the reference clock CKref, the frequencydivision circuit 202 divides the frequency of the operation clock CKa by16.

[Operation]

Next, the operation of the physical quantity detection circuit 22 shownin FIG. 7 will be described with reference to FIG. 8. Assume in thisembodiment that the phase of the analog sensor signal Ssnc lags behindthe phase of the reference clock CKref by “3t.” Assume also that fordividing the frequency of the operation clock CKa by 16, the frequencydivision circuit 202 includes a 5-bit counter, to supply the output,among five outputs of the 5-bit counter, which corresponds to the mostsignificant bit (MSB) as the analog detection signal Sdet.

The phase adjustment counter 201 starts counting the number of generatedpulses of the operation clock CKa in response to a transition edge ofthe reference clock CKref. At this time, when the set value SET is setat “3,” the phase adjustment counter 201 outputs the timing signal TTTonce the count value reaches “3.” The frequency division is circuit 202starts counting from the preset initial value (8 in the illustratedexample) in response to a transition edge of the timing signal TTT fromthe phase adjustment counter 201. Once the count value reaches themaximum value (15 in the illustrated example), the frequency divisioncircuit 202 resets the count value to “0.” The MSB output of thefrequency division circuit 202 is “1” when the count value of thefrequency division circuit 202 is any of 8 to 15 and “0” when it is anyof 0 to 7. This enables the analog detection signal Sdet to have thesame phase as that of the analog sensor signal Ssnc. In this way, thephase of the analog detection signal Sdet is determined with atransition edge of the timing signal TTT. In other words, the syncdetection circuit 104 starts detection of the physical quantity signalusing a transition edge of the timing signal TTT as the reference.

As described above, the phase of the analog detection signal Sdet can beset using the period of the operation clock CKa as the unit, and as thefrequency of the operation clock CKa is higher, the phase of the analogdetection signal Sdet can be set more precisely. Hence, the phaserelationship between the sensor signal S10 and the detection signal canbe adjusted more precisely than conventionally done, permittingimprovement in detection precision.

The phase adjustment circuit 200 may otherwise be constructed of digitalcircuits. With this configuration, the robustness against fabricationvariations and fluctuations in the surrounding environment can be moreenhanced than conventionally done.

The frequency division circuit 202 may divide another operation clock (aclock different in frequency from the operation clock CKa) having afrequency higher than the frequency of the reference clock CKref, togenerate the analog detection signal Sdet.

Alteration 1 of Embodiment 2

The phase adjustment counter 201 can also be applied to a digitizedphysical quantity detection circuit as shown in FIG. 9. A physicalquantity detection circuit 22 a shown in FIG. 9 includes the phaseadjustment counter 201 in place of the phase adjustment circuit 100shown in FIG. 3. The detection signal generator 113 starts generatingthe digital detection signal Ddet in response to a transition edge ofthe timing signal TTT from the phase adjustment counter 201. The otherconfiguration is similar to that in FIG. 3.

As shown in FIG. 10, when the set value SET is set at “3,” the phaseadjustment counter 201 outputs the timing signal TTT after a lapse ofthe time “3t” corresponding to three pulses of the operation clock CKafrom a transition edge of the reference clock CKref. The detectionsignal generator 113 outputs the sine wave data units D0, D1, D2, . . .in rotation in response to a transition edge of the timing signal TTTfrom the phase adjustment counter 201. This enables the digitaldetection signal Ddet to have the same phase as that of the analogsensor signal Ssnc.

The frequency adjustment counter 201 may operate in synchronization withanother operation clock (a clock different in frequency from theoperation clock CKa) having a frequency higher than the frequency of thereference clock CKref.

Alteration 2 of Embodiment 2

As shown in FIG. 11, another operation clock CKp may be generated inresponse to a transition edge of the timing signal TTT from the phaseadjustment counter 201. A physical quantity detection circuit 22 b shownin FIG. 11 includes a frequency division circuit 202 p (clock generationcircuit) and a decimation filter 116 in addition to the components shownin FIG. 9.

The frequency division circuit 202 p, starting frequency divisionprocessing in response to a transition edge of the timing signal TTTfrom the phase adjustment counter 201, divides the frequency of theoperation clock CKa to generate the operation clock CKp having afrequency lower than the frequency of the operation clock CKa. Thisenables the operation clock CKp to have the same phase as that of theanalog sensor signal Ssnc. While the analog-to-digital converter 112,the decimation filter 116, and the phase adjustment counter 201 operatein synchronization with the operation clock CKa from the frequencymultiplication circuit 102, the detection signal generator 113 and thedigital filter 115 operate in synchronization with the operation clockCKp from the frequency division circuit 202 p. Thus, the operatingfrequency is different between before and after the decimation filter116. The decimation filter 116 executes decimation processing(conversion of the sampling frequency, decimation of digital values,etc.) for the digital sensor signal Dsnc, to convert the digital sensorsignal Dsnc corresponding to the operation clock CKa to a digital sensorsignal Ddc corresponding to the operation clock CKp.

With the above configuration, even when the operation clock CKa for thephase adjustment counter 201 is different from the operation clock CKpfor the detection signal generator 113, it is possible to adjust thephase of the digital detection signal Ddet using the period of theoperation clock CKa as the unit.

Embodiment 3

FIG. 12 shows an example configuration of a physical quantity sensordevice of Embodiment 3. This physical quantity sensor device includes aphysical quantity detection circuit 32 in place of the physical quantitydetection circuit 12 a shown in FIG. 3. The physical quantity detectioncircuit 32 includes a phase adjustment circuit 300 for adjusting thephase of the digital sensor signal Dsnc in place of the phase adjustmentcircuit 100 shown in FIG. 3. The other configuration is similar to thatin FIG. 3.

The phase adjustment circuit 300 includes a shift register 300R and aselector 300S. The shift register 300R sequentially shifts the digitalsensor signal Dsnc in synchronization with the operation clock CKa fromthe frequency multiplication circuit 102, to generate m (m is an integerequal to or more than 2) delayed signals DD1, DD2, . . . , DDm whosephases are shifted from each other by a predetermined amount. The shiftregister 300R includes a plurality of cascaded flipflops, for example.The selector 300S selects one of the delayed signals DD1, DD2, . . . ,DDm according to a set value SET1 set under external control, andoutputs the selected delayed signal as a delayed digital sensor signalDDsnc. The set value SET1 is a value for setting the delay time in thephase adjustment circuit 300, which indicates the number of pulses ofthe operation clock CKa. The detection signal generator 113 startsgeneration of the digital detection signal Ddet in response to atransition edge of the reference clock CKref. The multiplier 114multiplies the delayed digital sensor signal DDsnc from the phaseadjustment circuit 300 by the digital detection signal Ddet from thedetection signal generator 113.

[Operation]

Next, the operation of the physical quantity detection circuit 32 shownin FIG. 12 will be described with reference to FIG. 13. Assume in thisembodiment that the phase of the analog sensor signal Ssnc leads thephase of the reference clock CKref by “3t.”

The analog-to-digital converter 112 converts the analog sensor signalSsnc to the digital sensor signal Dsnc. At this time, when the set valueSET1 is set at “3,” the shift register 300R selects the third delayedsignal DD3 as the delayed digital sensor signal DDsnc. In other words,the phase adjustment circuit 300 delays the digital sensor signal Dsncby the time “3t” corresponding to three pulses of the operation clockCKa. This enables the delayed digital sensor signal DDsnc to have thesame phase as that of the reference clock CKref (i.e., the phase of thedigital detection signal Ddet).

As described above, the phase of the sensor signal (delayed digitalsensor signal DDsnc) can be set using the period of the operation clockCKa as the unit, and as the frequency of the operation clock CKa ishigher, the phase of the delayed digital sensor signal DDsnc can be setmore precisely. Hence, the phase relationship between the sensor signaland the detection signal can be adjusted more precisely thanconventionally done, permitting improvement in detection precision.

The phase adjustment circuit 300 may otherwise be constructed of digitalcircuits. With this configuration, the robustness against fabricationvariations and fluctuations in the surrounding environment can be moreenhanced than conventionally done. The phase adjustment circuit 300 mayoperate in synchronization with another clock (a clock different infrequency from the operation clock CKa) having a frequency higher thanthe frequency of the reference clock CKref.

Alteration 1 of Embodiment 3

As shown in FIG. 14, two phase adjustment circuits may be used to adjustthe phase of the sensor signal (digital sensor signal DDsnc) and thephase of the detection signal (digital detection signal Ddet). Aphysical quantity detection circuit 32 a shown in FIG. 14 includes afrequency division circuit 311 b, a decimation filter 116, and the phaseadjustment circuit 100 shown in FIG. 3, in addition to the componentsshown in FIG. 12.

The frequency division circuit 311 b divides the frequency of theoperation clock CKa from the frequency multiplication circuit 102 togenerate an operation clock CKb having frequency lower than thefrequency of the operation clock CKa. While the analog-to-digitalconverter 112, the phase adjustment circuit 300, and the decimationfilter 116 operate in synchronization with the operation clock CKa fromthe frequency multiplication circuit 102, the phase adjustment circuit100, the detection signal generator 113, and the digital filter 115operate in synchronization with the operation clock CKb from thefrequency division circuit 311 b. Thus, the operating frequency isdifferent between before and after the decimation filter 116. Thedecimation filter 116 converts the delayed digital sensor signal DDsnccorresponding to the operation clock CKa to a digital sensor signal Ddccorresponding to the operation clock CKb.

[Operation]

Next, the operation of the physical quantity detection circuit 32 ashown in FIG. 14 will be described with reference to FIG. 15. Assume inthis embodiment that the phase of the analog sensor signal Ssnc lagsbehind the phase of the reference clock CKref by “5t.” Assume also thatthe decimation filter 116 decimates the delayed digital sensor signalDDsnc, eliminating every other digital value, to allow the delayeddigital sensor signal DDsnc to correspond to the frequency of theoperation clock CKb (½ of the frequency of the operation clock CKa).

When the set value SET1 is set at “1,” the phase adjustment circuit 300delays the digital sensor signal Dsnc by the time “t” corresponding toone pulse of the operation clock CKa. Hence, the phase differencebetween the reference clock CKref and the delayed digital sensor signalDDsnc becomes “6t.” Also, the phase difference between the referenceclock CKref and the digital sensor signal Ddc obtained by the decimationfilter 116 becomes “6t.” Meanwhile, when the set value SET is set at“3,” the phase adjustment circuit 100 delays the reference clock CKrefby the time “6t” corresponding to three pulses of the operation clockCKb, to output the resultant clock as the selected clock SSS. Hence, thephase difference between the reference clock CKref and the digitaldetection signal Ddet becomes “6t.” This enables the digital sensorsignal Ddc to have the same phase as that of the digital detectionsignal Ddet.

As described above, with the phases of both the sensor signal (delayeddigital sensor signal DDsnc) and the detection signal (digital detectionsignal Ddet) being settable, it is possible to correct both a phasedelay in the sensor signal and a phase delay in the detection signal.

Also, since the operation clock CKb is lower in frequency than theoperation clock CKa, the phase adjustment precision of the phaseadjustment circuit 100 is lower than that of the phase adjustmentcircuit 300. With this sharing of the phase adjustment processingbetween the phase adjustment circuits 100 and 300 that are different inphase adjustment precision, the circuit scale and power consumptionrequired for the phase adjustment processing can be reduced. Forexample, when a configuration permitting a maximum settable delay timeof “16t” where “t” is the period of the operation clock CKa is intended,16 flipflops must be provided for the phase adjustment circuit 100 inthe physical quantity detection circuit 12 a shown in FIG. 3. In thephysical quantity detection circuit 32 a shown in FIG. 14, however, onlyfour flipflops each may be provided for the phase adjustment circuits100 and 300.

Alteration 2 of Embodiment 3

The phase adjustment circuit 100 shown in FIG. 14 may be replaced withthe phase adjustment counter 201 shown in FIG. 9, as shown in a physicalquantity detection circuit 32 b shown in FIG. 16. The phase adjustmentcounter 201 operates in synchronization with the operation clock CKblower in frequency than the operation clock CKa. With thisconfiguration, also, similar effects to those in the case of FIG. 14 canbe obtained.

Alteration 3 of Embodiment 3

As shown in FIG. 17, three phase adjustment circuits may be used toadjust the phase of a sampling clock CKsp for the analog-to-digitalconverter 112, the phase of the sensor signal (delayed digital sensorsignal DDsnc), and the phase of the detection signal (digital detectionsignal Ddet). A physical quantity detection circuit 32 c shown in FIG.17 includes a frequency division circuit 311 a and a phase adjustmentcircuit 100 a, in addition to the components shown in FIG. 14.

The frequency multiplication circuit 102 multiplies the reference clockCKref to generate a multiplied clock CKx. The frequency division circuit311 a divides the frequency of the multiplied clock CKx from thefrequency multiplication circuit 102 to is generate the operation clockCKa having the same frequency as the sampling frequency required for theanalog-to-digital converter 112. The frequency division 311 b dividesthe frequency of the operation clock CKa from the frequency divisioncircuit 311 a to generate the operation clock CKb.

In the phase adjustment circuit 100 a, which is similar in configurationto the phase adjustment circuit 100, the shift register sequentiallyshifts the operation clock CKa in synchronization with the multipliedclock CKx, to generate a plurality of delayed clocks whose phases areshifted from each other by a predetermined amount. The selector of thephase adjustment circuit 100 a selects one of the plurality of delayedclocks generated by the shift register according to a set value SET2 setunder external control, and outputs the selected delayed clock as thesampling clock CKsp. The set value SET2 is a value for setting the delaytime in the phase adjustment circuit 100 a, which indicates the numberof pulses of the multiplied clock CKx.

[Operation]

Next, the operation of the physical quantity detection circuit 32 cshown in FIG. 17 will be described with reference to FIG. 18. Assume inthis alteration that the period of the multiplied clock CKx is “t” andthat the phase of the analog sensor signal Ssnc lags behind the phase ofthe reference clock CKref by “11t.” Assume also that the frequency ofthe operation clock CKa (sampling clock CKsp) and the frequency of theoperation clock CKb are respectively “¼” and “⅛” of the multiplied clockCKx.

Transition edges of the operation clock CKa (pre-phase-adjusted samplingclock CKsp) do not agree with desired sampling points SP0, SP1, SP2, . .. of the analog sensor signal Ssnc (e.g., points corresponding to sinewave data units D0, D1, D2, . . . ). At this time, when the set valueSET2 in the phase adjustment circuit 100 a is set at “3,” the phaseadjustment circuit 100 a delays the operation clock CKa by the time “3t”corresponding to three pulses of the multiplied clock CKx, and outputsthe resultant clock as the sampling clock CKsp. This enables thetransition edges of the sampling clock CKsp to agree with the desiredsampling points SP0, SP1, SP2 . . . .

When the set value SET1 in the phase adjustment circuit 300 is set at“1,” the phase adjustment circuit 300 delays the digital sensor signalDsnc by the time “4t” corresponding to one pulse of the operation clockCKa, and outputs the resultant signal as the delayed digital sensorsignal DDsnc. Since the phase of the operation clock CKa is shifted by“t” from the phase of the sampling clock CKsp, the phase differencebetween the reference clock CKref and the delayed digital sensor signalDDsnc becomes “16t (=3t+8t+t+4t).” Also, the phase difference betweenthe reference clock CKref and the digital sensor signal Ddc from thedecimation filter 105 becomes “16t.”

Meanwhile, when the set value SET in the phase adjustment circuit 100 isset at “2,” the phase adjustment circuit 100 delays the reference clockCKref by the time “16t” corresponding to two pulses of the operationclock CKb, and outputs the resultant clock as the selected clock SSS.Hence, the phase difference between the reference clock CKref and thedigital detection signal Ddet becomes “16t.”

As described above, the phase of the sampling clock CKsp for theanalog-to-digital converter 112 can be set using the period of themultiplied clock CKx as the unit. Also, by adjusting the phase of thesampling clock CKsp, the sampling points (positions of transition edgesof the sampling clock CKsp) can be shifted, and as a result, the phaseof the digital sensor signal Dsnc can be changed. It is thereforepossible to improve the precision of the phase adjustment whilesuppressing increase in the sampling frequency for the analog-to-digitalconverter 112. Also, since transition edges of the sampling clock can bemade to agree with (or approximated to) desired sampling points SP0,SP1, SP2, . . . , the precision of the analog-to-digital conversion canbe improved.

The frequency division circuit 311 b may otherwise generate theoperation clock CKb by dividing the frequency of the sampling clock CKspfrom the phase adjustment circuit 100 a.

Alteration 4 of Embodiment 3

As shown in FIG. 19, a phase adjustment counter may be used foradjusting the phase of the sampling clock CKsp for the analog-to-digitalconverter 112. A physical quantity detection circuit 32 d shown in FIG.19 includes a phase adjustment counter 201 a and a frequency divisioncircuit 202 a, in place of the phase adjustment circuit 100 a shown inFIG. 17. The other configuration is similar to that in FIG. 17. Thephase adjustment counter 201 a starts counting the number of generatedpulses of the multiplier clock CKx in response to a transition edge ofthe reference clock CKref, and outputs a timing signal STR once thecount value reaches a set value SET2 set under external control. Thefrequency division circuit 202 a starts frequency division processing inresponse to a transition edge of the timing signal STR from the phaseadjustment counter 201 a, dividing the frequency of the multiplied clockCKx from the frequency multiplication circuit 102 to generate a samplingclock CKsp having a predetermined frequency. Note that the phaseadjustment circuit 100 shown in FIGS. 17 and 19 may also be replacedwith the phase adjustment counter 201 shown in FIG. 9. In this case,also, similar effects to those in FIG. 17 can be obtained.

Other Embodiments

The physical quantity sensor 10 does not have to be of the tuning forktype, but may be of a circular cylinder type, a regular triangular prismtype, a square prism type, or a ring type, or may be of another shape.Otherwise, as shown in FIG. 20, the physical quantity sensor 10 may be acapacitive acceleration sensor. In this case, the physical quantitysensor 10 includes a fixed portion 10 b, a movable portion 10 c, movableelectrodes Pma and Pmb, detection electrodes Pfa and Pfb, and adifferential amplifier 10 d. The movable portion 10 c is connected tothe fixed portion 10 b so that it can be displaced according toacceleration. The movable electrodes Pma and Pmb are placed on themovable portion 10 c. The detection electrode Pfa and Pfb are placed onthe fixed portion 10 b so as to face the movable electrodes Pma and Pmb,respectively. That is, the movable electrode Pma and the detectionelectrode Pfa constitute a capacitor Ca, and the movable electrode Pmband the detection electrode Pfb constitute a capacitor Cb. A drivesignal Sdrv from an oscillation circuit 11 d is supplied to thecapacitors Ca and Cb. The differential amplifier 10 d outputs a sensorsignal S10 corresponding to the difference between the charge amountsgenerated in the detection electrodes Pfa and Pfb. Once accelerationoccurs, one of the capacitances of the capacitors Ca and Cb increaseswhile the other decreases, due to a displacement of the movable portion10 c. This causes a difference in charge amount between the detectionelectrodes Pfa and Pfb, and the sensor signal S10 corresponding to thisdifference is outputted.

In the above embodiments, the set values SET, SET1, and SET2 aredescribed as changeable values. Alternatively, the set values SET, SET1,and SET2 may be fixed values.

The physical quantity detection circuits described above, capable ofadjusting the phase relationship between the sensor signal and thedetection signal precisely, are suitable for physical quantity sensors(e.g., tuning fork type angular velocity sensors, capacitive 3.oacceleration sensors, etc.) used in mobile units, cellular phones,digital cameras, game machines, and the like.

It should be noted that the embodiments described above are essentiallypreferred illustrations, and by no means intended to restrict the scopeof the present invention, applications thereof, or uses thereof.

1. A physical quantity detection circuit used for a physical quantitysensor that outputs a sensor signal according to a physical quantitygiven externally, the circuit comprising: a first phase adjustmentcircuit configured to receive a reference clock having a frequencycorresponding to the frequency of the sensor signal and operate insynchronization with a first operation clock having a frequency higherthan the frequency of the reference clock, to delay a transition edge ofthe reference clock by a predetermined number of pulses of the firstoperation clock; and a detection circuit configured to detect a physicalquantity signal corresponding to the physical quantity from the sensorsignal using a transition edge of the reference clock delayed by thefirst phase adjustment circuit as the reference, wherein the first phaseadjustment circuit includes a shift register configured to shift thereference clock sequentially in is synchronization with the firstoperation clock to generate a plurality of delayed clocks; and aselector configured to select one of the plurality of delayed clocksgenerated by the shift register, and the detection circuit includes ananalog-to-digital converter circuit configured to convert the sensorsignal to a digital sensor signal, a detection signal generator circuitconfigured to generate a digital detection signal corresponding to asine wave signal in response to a transition edge of the delayed clockselected by the selector, and a multiplier circuit configured tomultiply the digital sensor signal obtained by the analog-to-digitalconverter circuit by the digital detection signal generated by thedetection signal generator circuit, to detect the physical quantitysignal.
 2. A physical quantity detection circuit used for a physicalquantity sensor that outputs a sensor signal according to a physicalquantity given externally, the circuit comprising: a first phaseadjustment circuit configured to receive a reference clock having afrequency corresponding to the frequency of the sensor signal andoperate in synchronization with a first operation clock having afrequency higher than the frequency of the reference clock, to delay atransition edge of the reference clock by a predetermined number ofpulses of the first operation clock: and a detection circuit configuredto detect a physical quantity signal corresponding to the physicalquantity from the sensor signal using a transition edge of the referenceclock delayed by the first phase adjustment circuit as the reference,wherein the first phase adjustment circuit includes a phase adjustmentcounter configured to start counting the number of generated pulses ofthe first operation clock in response to a transition edge of thereference clock and generate a timing signal once the number ofgenerated pulses reaches a predetermined value, and the detectioncircuit includes an analog-to-digital converter circuit configured toconvert the sensor signal to a digital sensor signal, a detection signalgenerator circuit configured to generate a digital detection signalcorresponding to a sine wave signal in response to a transition edge ofthe timing signal generated by the phase adjustment counter, and amultiplier circuit configured to multiply the digital sensor signalobtained by the analog-to-digital converter circuit by the digitaldetection signal generated by the detection signal generator circuit, todetect the physical quantity signal.
 3. The physical quantity detectioncircuit of claim 2, wherein the first phase adjustment circuit furtherincludes a clock generator circuit configured to generate an operationclock for the detection signal generator circuit in response to thetransition edge of the timing signal generated by the phase adjustmentcounter.
 4. The physical quantity detection circuit of claim 1, furthercomprising: a second phase adjustment circuit configured to receive thedigital sensor signal obtained by the analog-to-digital convertercircuit and operate in synchronization with a second operation clockhaving a frequency higher than the frequency of the reference clock, todelay the digital sensor signal by a predetermined number of pulses ofthe second operation clock, wherein the multiplier circuit multipliesthe digital sensor signal delayed by the second phase adjustment circuitby the digital detection signal.
 5. The physical quantity detectioncircuit of claim 4, wherein the frequency of the first operation clockis lower than the frequency of the second operation clock.
 6. Thephysical quantity detection circuit of claim 4, wherein the number ofpulses of the second operation clock for determining the delay time inthe second phase adjustment circuit is changeable.
 7. The physicalquantity detection circuit of claim 2, further comprising: a secondphase adjustment circuit configured to receive the digital sensor signalobtained by the analog-to-digital converter circuit and operate insynchronization with a second operation clock having a frequency higherthan the frequency of the reference clock, to delay the digital sensorsignal by a predetermined number of pulses of the second operationclock, wherein the multiplier circuit multiplies the digital sensorsignal delayed by the second phase adjustment circuit by the digitaldetection signal.
 8. The physical quantity detection circuit of claim 7,wherein the frequency of the first operation clock is lower than thefrequency of the second operation clock.
 9. The physical quantitydetection circuit of claim 7, wherein the number of pulses of the secondoperation clock for determining the delay time in the second phaseadjustment circuit is changeable.
 10. The physical quantity detectioncircuit of claim 1, wherein the number of pulses of the first operationclock for determining the delay time in the first phase adjustmentcircuit is changeable.
 11. The physical quantity detection circuit ofclaim 2, wherein the number of pulses of the first operation clock fordetermining the delay time in the first phase adjustment circuit ischangeable.
 12. A physical quantity detection circuit used for aphysical quantity sensor that outputs a sensor signal according to aphysical quantity given externally, the circuit comprising: ananalog-to-digital converter circuit configured to convert the sensorsignal to a digital sensor signal; a detection signal generator circuitconfigured to generate a digital detection signal corresponding to asine wave signal in response to a transition edge of a reference clockhaving a frequency corresponding to the frequency of the sensor signal;a phase adjustment circuit configured to receive the digital sensorsignal obtained by the analog-to-digital converter circuit and operatein synchronization with an operation clock having a frequency higherthan the frequency of the reference clock, to delay the digital sensorsignal by a predetermined number of pulses of the operation clock; and amultiplier circuit configured to multiply the digital sensor signaldelayed by the phase adjustment circuit by the digital detection signalgenerated by the detection signal generator circuit, to detect aphysical quantity signal corresponding to the physical quantity.
 13. Aphysical quantity sensor device comprising: the physical quantitydetection circuit of claim 1; the physical quantity sensor; and a drivecircuit configured to supply a drive signal having a predeterminedfrequency to the physical quantity sensor, wherein the frequency of thesensor signal and the frequency of the reference clock correspond to thefrequency of the drive signal.
 14. A physical quantity sensor devicecomprising: the physical quantity detection circuit of claim 2; thephysical quantity sensor; and a drive circuit configured to supply adrive signal having a predetermined frequency to the physical quantitysensor, wherein the frequency of the sensor signal and the frequency ofthe reference clock correspond to the frequency of the drive signal. 15.A physical quantity sensor device comprising: the physical quantitydetection circuit of claim 12; the physical quantity sensor; and a drivecircuit configured to supply a drive signal having a predeterminedfrequency to the physical quantity sensor, wherein the frequency of thesensor signal and the frequency of the reference clock correspond to thefrequency of the drive signal.